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Author:
Russell, T. J. (Thomas James), 1943-
Title:
Production-compatible microelectronic test structures for the measurement of interface state density and neutral trap density
[microform] / T.J. Russell ; prepared for Air Force Wright Aeronautical Laboratories and Naval Air Systems Command.
Format:
[microform] /
Publisher:
U.S. Dept. of CommerceNational Bureau of Standards ;
Copyright Date:
1982
Description:
iv, 36 p. : ill. ; 28 cm.
Reproduction Info:
Microfiche.
Subject:
Microelectronics.
Oxides--Thermal properties.
Electric charge and distribution.
Other Authors:
Air Force Wright Aeronautical Laboratories.
United States. Naval Air Systems Command.
United States. National Bureau of Standards.
Notes:
"January 1982." Includes bibliographical references.
Series:
NBSIR ; 81-2413
OCLC:
(OCoLC)711633473
Locations:
OVUX522 --
University of Iowa Libraries
(Iowa City)
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