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01031cam a2200289 a 4500 001 BB02D94A2B0911DE8AF32708A8D7520A 005 200904162339.0 008 040906s2004 enka f b 001 0 eng 020 $a 9780863413520 (hbk.) 020 $a 0863413528 (hbk.) 035 $a (OCoLC)56760285 040 $a UKM $c UKM $d SILO $d IXA $d OCL $d IWA $d SILO 245 0 $a Silicide technology for integrated circuits / $c edited by Lih J. Chen. 260 $a London : $b Institution of Electrical Engineers, $c c2004. 300 $a xviii, 279 p. : $b ill. ; $c 26 cm. 490 1 $a IEE processing series $v 5 504 $a Includes bibliographical references and index. 650 0 $a Silicides. 650 0 $a Integrated circuits $x Materials. 700 1 $a Chen, L. J. 710 2 $a Institution of Electrical Engineers. 830 0 $a EMIS processing series ; $v 5 939 $a 5405325 941 $a 1 952 $l USUX851 $d 20160823041215.0 956 $a http://locator.silo.lib.ia.us/search.cgi?index_0=id&term_0=BB02D94A2B0911DE8AF32708A8D7520A 994 $a 02 $b IWAInitiate Another SILO Locator Search