The Locator -- [(subject = "Radiation--Congresses--Congresses")]

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Title:
Extreme ultraviolet lithography : from the topical meeting, May 1-3, 1996, Boston, Massachusetts / edited by Glenn D. Kubiak and Don R. Kania ; sponsored by Optical Society of America.
Publisher:
The Society,
Copyright Date:
c1996
Description:
ix, 235 p. : ill. ; 28 cm.
Subject:
Optical coatings--Congresses.
Photolithography--Congresses.
Ultraviolet radiation--Congresses.--Congresses.
Interferometry--Congresses
Lasers--Congresses.--Congresses.
Other Authors:
Kubiak, Glenn D.
Kania, Don R.
Optical Society of America.
Notes:
Includes bibliographical references (p. 222-232) and indexes.
Series:
OSA Trends in optics and photonics ; v. 4
ISBN:
9781557524355
1557524351
OCLC:
(OCoLC)36176256
LCCN:
97136221
Locations:
USUX851 -- Iowa State University - Parks Library (Ames)

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