The Locator -- [(author = "Society of Photo-optical Instrumentation Engineers")]

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Title:
MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA / Srinivas A. Tadigadapa, Reza Ghodssi, Albert K. Henning, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.
Publisher:
SPIE,
Copyright Date:
c2007
Description:
1 v. (various pagings) : ill. ; 28 cm.
Subject:
Microelectromechanical systems.--Congresses.
Optoelectronic devices.--Congresses.
Other Authors:
Ghodssi, Reza.
Tadigadapa, Srinivas A.
Henning, Albert Karl.
Society of Photo-optical Instrumentation Engineers.
Notes:
Includes bibliographical references and author index.
Series:
Proceedings of SPIE, 0277-786X ; v. 6464
ISBN:
0819465771
9780819465771
OCLC:
(OCoLC)85381162
Locations:
USUX851 -- Iowa State University - Parks Library (Ames)

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