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Title:
Silicide technology for integrated circuits /
edited by Lih J. Chen.
Publisher:
Institution of Electrical Engineers,
Copyright Date:
c2004
Description:
xviii, 279 p. : ill. ; 26 cm.
Subject:
Silicides.
Integrated circuits--Materials.
Other Authors:
Chen, L. J.
Institution of Electrical Engineers.
Notes:
Includes bibliographical references and index.
Series:
IEE processing series 5
ISBN:
9780863413520 (hbk.)
0863413528 (hbk.)
OCLC:
(OCoLC)56760285
Locations:
USUX851 --
Iowa State University - Parks Library
(Ames)
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