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Author:
Rodriguez, Ainara.
Title:
Laser interference lithography for micro- and nano-fabrication :
design and development of a prototype for industrial end-users / Ainara Rodriguez, Santiago M. Olaizola, Isabel Ayerdi.
Publisher:
VDM,
Copyright Date:
2011
Description:
vii, 193 p. : Ill., map ; 22 cm.
Subject:
Nanotechnology.
Laser interferometry.
Microlithography.
Nanolithography.
Holographic lithography.
Other Authors:
Olaizola, Santiago M.
Ayerdi, Isabel.
Notes:
Includes bibliographical references (p. 181-193).
ISBN:
3639269365
9783639269369
OCLC:
(OCoLC)809198761
Locations:
USUX851 --
Iowa State University - Parks Library
(Ames)
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