Micro- and nanoscale systems : novel materials, structures and devices : symposium held December 1-6, 2013, Boston, Massachusetts, U.S.A. / editors, John J. Boeckl [and 8 others].
Previous conference proceedings entitled: MEMS, bioMEMS and bioelectronics--materials and devices. "Symposium XX , "Microelectromechanical Systems -- Materials and Devices," held from December 2 to December 4, 2013 at the MRS Fall Meeting"--Preface. "Symposium SS, "Nanowires and Nanotubes -- Novel Materials, Advanced Heterostructures, Doping and Devices," was held from December 1 to December 6, 2013 at the MRS Fall Meeting"--Preface. "This volume represents the sixth installment in a series of proceedings ... ; the first five volumes were published as Volumes 1052, 1139, 1222, 1299, and 1415"--Preface. Includes bibliographical references and indexes.
Series:
Materials Research Society symposium proceedings, 1946-4274 ; v. 1659
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