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Author:
Sarkar, Jaydeep (Materials scientist)
Title:
Sputtering materials for VLSI and thin film devices /
Jaydeep Sarkar.
Publisher:
William Andrew,
Copyright Date:
2014
Description:
x, 603 pages : ill. ; 25 cm.
Subject:
Microelectronics--Materials.
Cathode sputtering (Plating process)--Materials.
Integrated circuits--Materials.--Materials.
Thin film devices--Materials.
Flat panel displays--Materials.
Sputtering (Physics)
Notes:
Includes bibliographical references and index.
ISBN:
0815515936
9780815515937
OCLC:
(OCoLC)660539201
Locations:
USUX851 --
Iowa State University - Parks Library
(Ames)
OVUX522 --
University of Iowa Libraries
(Iowa City)
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