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Title:
Microlithography :
science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.
Edition:
2nd ed.
Publisher:
CRC Press,
Copyright Date:
c2007
Description:
848 p. : ill. ; 27 cm.
Subject:
Microlithography--Industrial applications.
Integrated circuits--Masks
Metal oxide semiconductors, Complementary--Design and construction.
Manufacturing processes
Other Authors:
Suzuki, Kazuaki
Smith, Bruce W., 1959-
Notes:
Includes bibliographical references and index.
Series:
Optical science and engineering ; 126
ISBN:
0824790243 (alk. paper)
9780824790240 (alk. paper)
OCLC:
(OCoLC)71581976
LCCN:
2006031516
Locations:
USUX851 --
Iowa State University - Parks Library
(Ames)
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