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02723aam a2200433Ii 4500 001 9D77D60C6B5511E69AFE1DDBDAD10320 003 SILO 005 20160826010517 008 140723t20142014paua b 101 0 eng 020 $a 160511636X 020 $a 9781605116365 035 $a (OCoLC)884449687 040 $a LHL $b eng $e rda $c LHL $d OCLCO $d BTCTA $d YDXCP $d UKMGB $d VRC $d MYG $d WAU $d OCLCA $d IWA $d SILO 111 2 $a Symposium XX, "Microelectromechanical Systems--Materials and Devices" $d (2013 : $c Boston, Mass.), $j author. 245 10 $a Micro- and nanoscale systems : $b novel materials, structures and devices : symposium held December 1-6, 2013, Boston, Massachusetts, U.S.A. / $c editors, John J. Boeckl [and 8 others]. 264 1 $a Warrendale, Pennsylvania : $b Materials Research Society ; $c 2014. 300 $a x, 235 pages : $b illustrations ; $c 24 cm. 490 1 $a Materials Research Society symposium proceedings, $x 1946-4274 ; $v v. 1659 500 $a Previous conference proceedings entitled: MEMS, bioMEMS and bioelectronics--materials and devices. 500 $a "Symposium XX , "Microelectromechanical Systems -- Materials and Devices," held from December 2 to December 4, 2013 at the MRS Fall Meeting"--Preface. 500 $a "Symposium SS, "Nanowires and Nanotubes -- Novel Materials, Advanced Heterostructures, Doping and Devices," was held from December 1 to December 6, 2013 at the MRS Fall Meeting"--Preface. 500 $a "This volume represents the sixth installment in a series of proceedings ... ; the first five volumes were published as Volumes 1052, 1139, 1222, 1299, and 1415"--Preface. 504 $a Includes bibliographical references and indexes. 650 0 $a Microelectromechanical systems $v Congresses. 650 0 $a Biotechnology $v Congresses. 650 0 $a Bioelectronics $v Congresses. 650 0 $a Nanowires $v Congresses. 650 0 $a Nanotubes $v Congresses. 700 1 $a Boeckl, John J., $e editor. 710 2 $a Materials Research Society. $b Fall Meeting $d (2013 : $c Boston, Mass.) 711 2 $a Symposium SS, "Nanowires and Nanotubes--Novel Materials, Advanced Heterostructures, Doping and Devices" $d (2013 : $c Boston, Mass.), $j author. 776 08 $i Online version: $t Micro- and nanoscale systems. $d Warrendale, Pennsylvania : Materials Research Society ; Cambridge : Cambridge University Press, [2014] $w (OCoLC)891102145 830 0 $a Materials Research Society symposia proceedings; $v v. 1659. 856 41 $u http://journals.cambridge.org/action/displayIssue?jid=OPL&volumeId=1659 941 $a 2 952 $l OVUX522 $d 20191217020246.0 952 $l USUX851 $d 20160826094053.0 956 $a http://locator.silo.lib.ia.us/search.cgi?index_0=id&term_0=9D77D60C6B5511E69AFE1DDBDAD10320 994 $a C0 $b IWAInitiate Another SILO Locator Search