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02209aam a2200409 a 4500 001 43EAE9C045E811E3A4FDE4CADAD10320 003 SILO 005 20131105010132 008 130531s2012 enka b 101 0 eng d 020 $a 1627482377 (paperback) 020 $a 9781627482370 (paperback) 035 $a (OCoLC)850328143 040 $a UKMGB $b eng $c UKMGB $d OCLCO $d OCLCA $d NhCcYBP $d SILO 050 4 $a TK7871.99.M44 $b I58 2012 082 04 $a 621.38152 $2 23 111 2 $a Interconnect Challenges for CMOS Technology - Materials, Processes and Reliability for Downscaling, Packaging and 3D Stacking (Symposium) $d (2012 : $c San Francisco, Calif.) 245 10 $a Interconnect challenges for CMOS technology - materials, processes and reliability for downscaling, packaging and 3D stacking : $b April 9-13, 2012, San Francisco, California, USA / $c [editors, G. Dubois, F. Iacopi, A. Sekiguchi, S. W. King, C. Dussarat]. 246 13 $a Materials, processes and reliability for downscaling, packaging and 3D stacking 246 30 $a Interconnect challenges for CMOS technology 264 1 $a Cambridge : $b Cambridge University Press, $c [2012] 300 $a 87 pages : $b illustrations ; $c 24 cm. 490 1 $a MRS symposium series ; $v volume 1428 500 $a Held at the 2012 MRS Spring Meeting as Symposium C. 500 $a "Printed from e-media with permission by: Curran Associates, Inc." 504 $a Includes bibliographical references and index. 650 0 $a Metal oxide semiconductors, Complementary $x Design and construction $v Congresses. 650 0 $a Materials $x Research $v Congresses. 700 1 $a Dubois, Geraud, $e editor of compilation. 700 1 $a Iacopi, F. $q (Francesca), $e editor of compilation. 700 1 $a Sekiguchi, A. $q (Atsuko), $e editor of compilation. 700 1 $a King, S. W. $q (Sean W.), $e editor of compilation. 700 1 $a Dussarat, C. $q (Christian), $e editor of compilation. 710 2 $a Materials Research Society. $b Spring Meeting $d (2012 : $c San Francisco, Calif.) 830 0 $a Materials Research Society symposia proceedings ; $v v. 1428. 941 $a 1 952 $l OVUX522 $d 20240619011406.0 956 $a http://locator.silo.lib.ia.us/search.cgi?index_0=id&term_0=43EAE9C045E811E3A4FDE4CADAD10320Initiate Another SILO Locator Search