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01075aam a2200301Mi 4500 001 1959A89C2FC611E7A3652FCCDAD10320 003 SILO 005 20170503010126 008 161012s2017 enka b 000 0 eng d 020 $a 9781785480966 020 $a 1785480960 035 $a (OCoLC)960278774 040 $a YDX $b eng $e rda $c YDX $d SILO 050 4 $a TK7871.99.M44 $b P63 2017 082 04 $a 621.39/732 $2 23 245 00 $a Plasma etching for CMOS devices realization / $c edited by Nicolas Posseme. 264 1 $a London : $b ISTE Press Ltd ; $c 2017. 300 $a x, 121 pages : $b illustrations ; $c 24 cm. 490 1 $a Electronics engineering 504 $a Includes bibliographical references. 650 0 $a Metal oxide semiconductors, Complementary $x Design and construction. 650 0 $a Plasma etching. 700 1 $a Posseme, Nicolas, $e editor. 830 0 $a Electronics engineering series (London, England) 941 $a 1 952 $l USUX851 $d 20170706035421.0 956 $a http://locator.silo.lib.ia.us/search.cgi?index_0=id&term_0=1959A89C2FC611E7A3652FCCDAD10320 994 $a 92 $b IWAInitiate Another SILO Locator Search