The Locator -- [(author = "Society of Photo-optical Instrumention Engineers")]

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Title:
Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California / Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publisher:
SPIE,
Copyright Date:
c1992
Description:
ix, 207 p. : ill. ; 28 cm.
Subject:
Semiconductor doping--Congresses.
Semiconductors--Congresses.--Congresses.
Vapor-plating--Congresses.
Other Authors:
Kwong, Dim-Lee.
Moslehi, Mehrdad M.
Singh, Rajendra, 1946-
Society of Photo-optical Instrumention Engineers.
Notes:
"Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix. Includes bibliographical references and index.
Series:
Proceedings / SPIE--the International Society for Optical Engineering ; v. 1595
ISBN:
9780819407269
0819407267
OCLC:
(OCoLC)25684134
(OCoLC)25624466
LCCN:
91067548
Locations:
USUX851 -- Iowa State University - Parks Library (Ames)
OVUX522 -- University of Iowa Libraries (Iowa City)

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