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01724aam a2200349 a 4500 001 C0A1E954EA6011E094823B976AFF544E 003 SILO 005 20110929010228 007 he umb---buca 008 820911s1982 dcua bb f100|0 eng d 035 $a (OCoLC)711602646 040 $a GPO $c GPO $d SILO $d MvI $d SILO 074 $a 247 (MF) 086 0 $a C 13.10:400-72 245 0 $a NBS/RADC workshop, moisture measurement technology for hermetic semiconductor devices, II $h [microform]: $b proceedings of the NBS/RADC workshop held at the National Bureau of Standards, Gaithersburg, MD, November 5-7, 1980 / $c Elaine C. Cohen and Stanley Ruthberg, editors. 260 $a Washington, D.C. : $b U.S. Dept. of Commerce, National Bureau of Standards : $c 1982. 300 $a vi, 294 p. : $b ill. ; $c 28 cm. 440 0 $a NBS special publication ; $v 400-72 440 0 $a Semiconductor measurement technology 533 $a Microfiche. 500 $a "Semiconductor Materials and Processes Division, Center for Electronic and Electrical Engineering, National Engineering Laboratory, National Bureau of Standards." 500 $a "This activity was sponsored by Rome Air Development Center ... and National Bureau of Standards." 500 $a "Issued April 1982." 504 $a Includes bibliographical references. 650 0 $a Moisture $x Congresses. $x Congresses. 700 1 $a Ruthberg, Stanley. 700 1 $a Cohen, Elaine C. 710 2 $a Center for Electronics and Electrical Engineering (U.S.) $b Semiconductor Materials and Processes Division. 710 2 $a Rome Air Development Center. 941 $a 1 952 $l OVUX522 $d 20180118044447.0 956 $a http://locator.silo.lib.ia.us/search.cgi?index_0=id&term_0=C0A1E954EA6011E094823B976AFF544EInitiate Another SILO Locator Search