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01310cam a2200289Ia 4500 001 1673651C2AD111DE9C953A05A8D7520A 005 200904161653.0 008 930423s1993 waua b 101 0 eng d 010 $a 92063069 020 $a 9780819410368 (pbk.) 020 $a 0819410365 (pbk.) 035 $a (OCoLC)27969648 040 $a SCT $c SCT $d SILO $d IWA $d SILO 245 0 $a Excimer lasers : $b applications, beam delivery systems, and laser design : 18-19 November 1992, Boston, Massachusetts / $c James A. Greer, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering. 260 $a Bellingham, Wash., USA : $b SPIE, $c c1993. 300 $a vii, 222 p. : $b ill. ; $c 28 cm. 490 1 $a Proceedings / SPIE--the International Society for Optical Engineering ; $v v. 1835 504 $a Includes bibliographical references and index. 650 0 $a Excimer lasers $x Congresses. 700 10 $a Greer, James A. 710 20 $a Society of Photo-optical Instrumentation Engineers. 830 0 $a Proceedings of SPIE--the International Society for Optical Engineering ; $v v. 1835. 939 $a 800900 941 $a 2 952 $l OVUX522 $d 20231017011819.0 952 $l USUX851 $d 20160813120059.0 956 $a http://locator.silo.lib.ia.us/search.cgi?index_0=id&term_0=1673651C2AD111DE9C953A05A8D7520AInitiate Another SILO Locator Search